we had focused on the development of linear-motor-based precision subsystem for high-end application such as wafer probe card, IC tester, TFT/LCD manufacturing equipment (4.5G ~ 8.5G), LED manufacturing equipment( die bonder, wire bonder, chip sorter), PCB machine (SMT, PCB router, steel plate laser cutting), and many more..( Please see reference for detail) we started to serialize and automatically produce the zero-cogging force iron core linear motor, which we invented for our high-end application. Since the iron-core linear motor has the highest efficiency and lowest temperature rise, these two features are very important for the application of high precision positioning. However, the iron-core linear motor has the drawback of cogging force which is a considerable disadvantage from the viewpoint of fast settling and low speed stability. Hence, we spent two years of R&D effort to reduce the cogging force. Now, the cogging force of our motor is only one eighth as compared to that of Japanese first brand. In addition, the attractive force between mover and stator is another disadvantage of the iron-core linear motor from the viewpoint of easiness of installation. But, from the viewpoint of precision motion, it is worthy to mention that the attractive force between mover and stator is a good feature to preload the linear guide for smoothness and higher rigidity. Our ambition is to replace ironless linear motor with this zero cogging iron-core linear motor. we completed the novel position self-sensing technology for linear motor, also known as scaleless linear motor technology. The resolution can be down to 1 um for all series of our linear motor. It is very easy and confident to apply linear motor to a very long stroke, high-pollution, or cost limited environment. applying linear motor to high vacuum environment becomes the main goal along the road map of our technology development, more specifically, the application of electron beam inspection system. The feature of this proposed approach can really solve the heat dissipation issue of the linear motor without using water cooling, and the interference of ac electromagnetic wave form motor winding. The final product can achieve sub-micron accuracy XY and theta positioning under 10e-7 torr vacuum pressure. We have delivered more than 20 sets of the stages to the worldwide number 1 semiconductor manufacturing company. Magtronics Technology Inc. started in 2006. The team members are mainly from ITRI and very experienced in the field of precision mechanics and control. It is also worthy to mention that some members have participated the technology transfer with NSK and Toshiba, some have worked for ARM as the seeded instructor in Asia, and some were the consultants of many electrical machine company.The main expertise of our team includes1. design and installation of ultra-precision stage2. design and manufacturing of DDL, DDR, and VCM 3. firmware and hardware design of motor drive4. research and design of novel sensors Ultra-precision laser drill stage for wafer probe card Z-Pitch-Roll positioning module with force feedback for wafer bonding of advanced packaging Ultra precision positioning stage for line-scan wafer inspector Ultra precision positioning stage for electron-beam microscope YZ high-speed stage for flip chip bonder XYZ precision stage for optical lens dispenser on LED wafer Precision stage for submicron EDM (electrical discharging machine) Laser drill machine for back light module Gantry stage for cell phone PCB remounting XY high-speed stage for SMD steel plate laser cutting machine Long stroke positioning module for outdoor banner printer Long stroke positioning module for LCD panel handler Gantry stage with carbon fiber moving beam for laser cutting machine Air-bearing positioning stage for magnetic field measurement system of synchrotron radiation